Inductively Coupled Etching System

Description

Argonne National Laboratory is seeking quotations for an Inductively Coupled Etching System in accordance with the Statement of Work titled “Q-NEXT Inductively Coupled Etching System,” dated April 27, 2026.

Award will be made on a Lowest Price, Technically Acceptable (LPTA) basis. Vendors must provide sufficient documentation to demonstrate that their proposed system meets all technical requirements of the Statement of Work.

Please submit:

A completed ANL-70 Request for Quotation with pricing and supporting technical evidence
A completed ANL-70B Representations and Certificiations

Responses are due no later than 5:00 p.m. CDT on May 26, 2026.

Classifications

NAICS

333242

Semiconductor Machinery Manufacturing

31-33├Manufacturing

333├Machinery Manufacturing

3332├Industrial Machinery Manufacturing

33324├Industrial Machinery Manufacturing

333242└Semiconductor Machinery Manufacturing

PSC

6640

LABORATORY EQUIPMENT AND SUPPLIES

66├INSTRUMENTS AND LABORATORY EQPT

6640└Laboratory Equipment and Supplies

Documents

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