Combined Sources Sought Notice and Notice of Intent to Award a Sole Source Contract for X-ray Computed Tomography Microscope

Combined Sources Sought Notice and Notice of Intent to Award a Sole Source Contract for X-ray Computed Tomography Microscope

Notice ID: NIST-AMD-NOISSN-26-30500006

Contract Opportunity Type: Sources Sought

Response Date: August 18, 2026 at 11:00 AM ET

Product Service Code (PSC): 6650 – Optical Instruments, Test Equipment, Components and Accessories

NAICS Code: 334516 – Analytical Laboratory Instrument Manufacturing, with the small business size standard of 1,000 Employees

BACKGROUND

The National Institute of Standards and Technology (NIST) is conducting market research to identify alternative sources that (a) are capable of meeting NIST’s minimum requirements for the following commercial products and commercial services and (b) would be interested in competing for that requirement:

The Precision Imaging Facility at the National Institute of Standards and Technology (NIST) is involved in the characterization of metals, semiconductors, and insulators in support of multiple projects.  Materials characterization allows NIST scientists to make direct correlations between material processing, (nano)structure, and resulting properties.  This work involves the correlation of processing, structure, and properties of semiconductor material devices using three-dimensional X-ray computed tomography (XCT).  Consistent with NIST’s mission to develop measurement science, a particular research focus is to evaluate the sources of systematic and statistical error that limit the efficacy of XCT techniques, to devise strategies to mitigate these uncertainties, and to develop metrics that quantify the results.

The NIST PIF owns and performs research using a Zeiss Versa XRM 500 microscope system. The system is now over ten years old and is no longer eligible for technical service support from the manufacturer or any third parties. NIST now requires a new XCT microscope for micro-scale three-dimensional imaging of semiconductor materials and devices. The new microscope must meet the requirements detailed below and the ability to produce data which is compatible with data previously produced by NIST’s current Zeiss Versa XRM 500 microscope system.

Line Item 0001:

Description: X-ray Computed Tomography Microscope (One)

The XCT instrument shall (1) accept prepared (e.g. a glass tube of powder) or bulk samples (e.g. a computer chip) for analysis, (2) generate a high-energy X-ray beam which is transmitted through the thin specimen, (3) detect the transmitted X-rays to produce an projected image of the specimen, (4) rotate and move the specimen using a built-in high-precision specimen while collecting additional images, and (5) use a software algorithm to reconstruct the collected images into a three-dimensional representation of the specimen. The system shall also include the following:
 

1. System Resolution
   1. The system shall have an ultimate spatial resolution of 450 nm or smaller.
   2. The minimum achievable voxel size shall be 40 nm or smaller.
   3. The system shall be mechanically and electronically stable enough to perform continuous data collection actions that last up to 36 hours.
2. X-ray Source:
   1. The X-ray source shall be a sealed tube X-ray source
   2. The source voltage shall be variable from 30 kV to 160 kV
   3. The maximum power output shall be 25 W or higher.
   4. All X-ray source parameters shall be fully controllable from the instrument control software.
   5. The instrument shall include all X-ray filters that are required to achieve optimal imaging performance for all X-ray powers, detectors, imaging modes, and software packages included in these specifications.
      1. The tool shall include a “filter wheel” or similar fixture to house multiple X-ray filters.
      2. The X-ray filters within the “filter wheel” shall be adjustable via the instrument control software without physical interaction with the tool.
   6. The X-ray source shall move as necessary to accommodate all lenses, detectors, and imaging modes.
       
3. Specimen Stage:
   1. The specimen stage shall allow for 360º rotation of a specimen.
   2. The specimen stage shall have a minimum travel of:
      1. 50 mm in the X-direction (horizontal, perpendicular to the X-ray source)
      2. 100 mm in the Y-direction (parallel to the X-ray source)
      3. 50 mm in the Z-direction (vertical, perpendicular to the x-ray source)
   3. The stage shall accommodate specimens with a mass up to 25 kg
       
4. Optics
   1. If required by the system design, the instrument shall include all lenses and other optics to attain the system resolution(s) in Section A of this document.
   2. The system shall include a two-stage optics-based magnification/detection system to leverage both geometric and optical magnification.
      1. The optical system shall include lenses with magnifications of 0.4X, 4X, 20X, and 40X.
      2. The optical system shall include a detector that is at least 60 megapixels
          
5. Detectors, Cameras, and Imaging Modes
   1. The instrument shall include a visible light camera inside the radiation enclosure to visualize stage movements with the enclosure door closed.
   2. The system shall include a flat-panel type X-ray detector.
      1. The total detector size of shall be 6 megapixels or more.
      2. The flat panel detector shall allow for a spatial resolution of 12 µm or smaller.
   3. The system shall include all required optics, lenses, detectors, or imaging modes to allow for the maximum resolution specified in Section A of this document.
   4. The system shall include all lenses, detectors, software, and imaging modes required to enable a wide-field imaging mode using one of the standard detectors listed in item b above.
   5. The system shall include all lenses, detectors, software, and imaging modes require to enable a wide-field imaging mode with a maximum 2D field of view of 140 mm x 93 mm.
   6. The system shall be field upgradable to include a diffraction contrast tomography imaging mode, including all detectors, hardware, and software to enable diffraction contrast tomography.
       
6. Software
   1. The instrument shall include software that provides full control over the instrument, including, but not limited to:
      1. Adjusting X-ray energy and/or power
      2. Moving all instrument stages in all dimensions
      3. Starting, stopping, or modifying data acquisition
      4. Saving all data and metadata in an accessible, open format and/or providing full, easy to use export to open formats such as hdf5 or similar for both raw (projection, stage motions, etc.) and processed (3D reconstructions, volumetric resolutions, etc.) data and metadata.
   2. The Contractor shall include software and associated licenses to provide support for 3D reconstruction of tomographic datasets. This software shall include:
      1. Standard 3D reconstruction of tomographic data sets.
      2. Vertical stitching of tomographic data sets to allow for higher effective vertical field of view
      3. Segmenting, virtual sectioning, and manipulation of reconstructed 3D tomographic data sets.
   3. The Contractor shall provide acquisition and reconstruction software that is integrated with modern artificial intelligence (AI) and machine learning (ML) algorithms.
      1. These algorithms shall allow a user to enhance reconstruction, speed up reconstruction, enhance data collection, or speed up data collection.
      2. This integrated acquisition and reconstruction software shall be licensed (with software updates) for a minimum of two years.
   4. The instrument shall include a software API such that the instrument can be fully controlled using a common scripting language.
      1. The API shall include robust documentation for all API functions.

1. Vacuum System:
   1. All vacuum pumps and/or vacuum pumping systems that are required by or included with the system shall be oil free.
   2. All routine operations of any vacuum system shall be integrated into the instrument control software with software/hardware interlocks that prevent users from accidentally venting any or all of the vacuum system. 

1. Computer Workstations
   1. The instrument shall include a control computer with all necessary hardware, software, and peripherals to safely operate the XCT system.
   2. The Contractor shall provide a high-performance “offline” workstation (i.e. not connect to the instrument) for postprocessing of collected data.
      1. The offline workstation shall include perpetual licenses for all software required to process, analyze, and reconstruct collected data.

1. Radiation Safety
   1.  The system enclosure shall include all shielding for safe operation of the X-ray source.
   2. The system enclosure, X-ray source, and all other parts that may lead to radiation exposure shall be fully interlocked such that the X-ray source cannot operate if the enclosure is opened and/or shielding is removed.
   3. The system shall include an “X-ray on” light to indicate when the X-ray source is powered on and when the internal system shutters are open.
   4. The system enclosure shall include one or more pass-throughs to allow wires and/or cables to enter the system while maintaining radiation safety.

1. Remote Operation
   1. The instrument shall include all software packages or licenses required to enable remote operation from a remote site

1. Support Equipment
   1. If required, the Contractor shall provide a water-cooled water chiller to provide cooling water to the instrument and any other Contractor supplied equipment that requires cooling water.

1. Physical Requirements
   1. The instrument shall be in a radiation-safe enclosure
   2. The instrument (including all enclosures) shall fit in a laboratory with a ceiling height of 13 feet (3.96 meters)
   3. The instrument shall fit in a room that is 23 feet (7.01 meters) wide and 23 feet (7.01 meters) deep

1. Training
   1. The Contractor shall provide at least three days of on-site training for up to five NIST staff members. Training shall include operation of the instrument and basic instrument maintenance operations. Training shall be performed on the NIST Boulder campus located at 325 Broadway, Boulder, CO 80305.
   2. In addition to the specified on-site training, the Contractor shall provide at least three additional days of remote applications support and/or training.
   3. The Contractor shall provide hard copy and electronic copy of all manuals for the XCT microscope system.

1. Electrical Power
   1. The system and all of its components shall be able to be powered by either 120 V/60 Hz single phase power or 208 V/60 Hz single phase or 208 V / 60 Hz three phase power. If the tool requires power other than those described above, the Contractor shall provide a suitable transformer that can be powered using the above electrical specifications.
       
2. Warranty
   1. The Contractor shall provide a comprehensive warranty to cover the instrument for a period of one (1) year. The warranty shall cover all parts, labor, and travel related to execution of the warranty.

NIST has not yet determined its acquisition strategy for this requirement and encourages interested sources to respond to this Notice.

If NIST’s market research indicates there are alternative sources that are capable and interested in competing to fill this requirement, separate and apart from Carl Zeiss Microscopy, LLC, then NIST will consider conducting a competitive acquisition in accordance with law and regulation. To be clear, NIST’s identification of Carl Zeiss Microscopy, LLC in this Notice does not constitute a binding commitment or obligation for it to conduct a sole source procurement with Carl Zeiss Microscopy, LLC for this requirement.

Instructions for Responding to Respond to This Notice

Parties that respond to this Notice are requested to voluntarily submit the requested information via email in Microsoft Word, Adobe PDF, and/or Microsoft Excel format to the designated point(s) of contact whose name and email address appears at the bottom of this notice. Please provide only the information requested by this Notice, and do not include proprietary, classified, confidential, or sensitive information in a response to this Notice.

Information Requested in Response to This Notice: To help NIST with its market research, NIST is requesting that industry sources carefully review this notice and any attachments to it and voluntarily provide the following information: 

1. Company Summary

• Notice Identification: Notice ID and Title of this posting.

• Corporate Details: Company name, physical address, website address, and Unique Entity Identifier (UEI).

• Point of Contact (POC): Name, phone number, and email address.

• Company Size Standard: Your company’s size status relative to the NAICS code provided in this Notice. (Refer to the SBA Table of Small Business Size Standards).

• System for Award Management (SAM) Registration: Indicate whether your company has an active registration for procurement purposes in SAM.gov.

1. Feedback for Draft Requirements

• Review the potential requirements/minimum specifications included with this Notice. Then, please provide suggestions to (a) improve clarity of it; (b) to make it more competitive; (c) to indicate whether there anything in it that may inadvertently exclude domestic involvement; and (d) to indicate how the requirements could potentially be revised to improve the ability for domestic (“Made in America”) end products to be considered.

1. Information Regarding Your Company’s Products and Services

• Provide specifications, company name of the original equipment manufacturer, and the country of manufacture for products and services that your company is legally authorized to sell and that may meet NIST’s minimum requirements.

• • Indicate whether, in your opinion, the product(s) meet the definition of (a) commercial product or (b) commercially available off-the-shelf (COTS) item or COTS item as described at https://www.acquisition.gov/far-overhaul/far-part-deviation-guide/far-overhaul-part-2 and, if so, which definition applies ((a) or (b)).

• • Indicate whether, in your opinion, the service(s) meet the definition of commercial service as described at https://www.acquisition.gov/far-overhaul/far-part-deviation-guide/far-overhaul-part-2.

• Standard Commercial Pricing: Provide your company’s standard commercial pricing information for the identified products and services and explain what is included in those standard prices.

• Estimated Price Range: You may provide an estimated price or price range for the requirements, including a brief explanation of how the price estimate was developed.

• Standard Commercial Terms and Conditions: Provide a copy of the standard commercial terms and conditions for the commercial products and commercial services identified in the response to this notice, including nature and duration of standard commercial warranty.

1. Regulatory and Supply Chain Compliance

• Indicate whether your company could comply with FAR Clause 52.219-14, Limitations on Subcontracting (OCT 2022) if this acquisition were to be set aside for small businesses. Provide a brief supporting explanation.

1. Existing Governmentwide Contract Vehicles

• Indicate whether your company has its own GSA Multiple Award Schedule (MAS) contract or other federal contract vehicles under which NIST could award an order and, if so, provide the contract details (contract number, Contracting Officer name/contact, SOW, terms and conditions, and price lists).

We truly appreciate your company’s willingness to provide the above-mentioned information which NIST will be valuable in helping NIST complete its market research.

Important Notes

This Notice does not obligate the Government to award a contract or otherwise pay respondents to this notice for information provided in response to this Notice. Following a review of the responses and market research, NIST may publish a solicitation on an authorized site, depending on the chosen acquisition strategy. Responses received after the closing date for this Notice may not be considered.

There is no solicitation available at this time.

The Government reserves the right to use information that it receives in response to this Notice as it deems appropriate to establish final requirements or for other legally appropriate purposes.

Any organization responding to this notice should ensure that its response is complete and sufficiently detailed to allow the Government to determine the organization’s capability.

Respondents are advised that the Government is under no obligation to acknowledge receipt of the information received or provide feedback to respondents with respect to any information submitted.

After a review of the responses received, a synopsis and solicitation may be published on GSA’s eBuy or SAM.gov. However, responses to this notice will not be considered an adequate response to any such solicitation(s).

QUESTIONS ABOUT THIS NOTICE

For additional information, please contact the primary contact or, if named, secondary contact identified at the bottom of this notice.

THANK YOU

Thank you for taking the time to read this notice and for your interest in helping NIST with its efforts to maximize competition!